淄博(bo)言(yan)赫特(te)氣有限公司現有年產2000噸高純氯化(hua)氫生(sheng)產線，連續批量(liang)生(sheng)產應用于單晶硅外延片制造的(de)5N(99.999%)電(dian)子級(ji)(VLSI)氯化(hua)氫。

    電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)級(ji)(ji)氯化(hua)(hua)(hua)(hua)氫(qing)廣泛應(ying)用(yong)于半(ban)導體、微電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)和關聯的(de)(de)(de)(de)(de)太陽能(neng)電(dian)(dian)(dian)(dian)池等(deng)高(gao)(gao)(gao)科技產業(ye)，或用(yong)于薄膜(mo)堆(dui)積、刻蝕(shi)、摻雜、鈍(dun)化(hua)(hua)(hua)(hua)、清(qing)洗，或用(yong)作載(zai)氣(qi)(qi)(qi)(qi)、維護氣(qi)(qi)(qi)(qi)氛等(deng)等(deng)。因為半(ban)導體和微電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)技能(neng)向更高(gao)(gao)(gao)功能(neng)、更高(gao)(gao)(gao)集(ji)成度(du)開(kai)展(zhan)，對(dui)電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)級(ji)(ji)氯化(hua)(hua)(hua)(hua)氫(qing)的(de)(de)(de)(de)(de)純(chun)度(du)提出了越來越高(gao)(gao)(gao)的(de)(de)(de)(de)(de)需(xu)求(qiu)，電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)級(ji)(ji)特(te)氣(qi)(qi)(qi)(qi)的(de)(de)(de)(de)(de)凈(jing)(jing)化(hua)(hua)(hua)(hua)更加要害和重要。目前(qian)國內(nei)的(de)(de)(de)(de)(de)超高(gao)(gao)(gao)純(chun)度(du)凈(jing)(jing)化(hua)(hua)(hua)(hua)技能(neng)首要依(yi)靠(kao)進口(kou)，本身的(de)(de)(de)(de)(de)技能(neng)水準(zhun)（6N）與國際先進水平(ping)(8-9N)有較大距離。本項目將(jiang)描繪(hui)和研制一系列高(gao)(gao)(gao)效、高(gao)(gao)(gao)容(rong)量(liang)、高(gao)(gao)(gao)選擇性、低成本的(de)(de)(de)(de)(de)新式納米凈(jing)(jing)化(hua)(hua)(hua)(hua)劑(ji)，對(dui)MO源、惰性氣(qi)(qi)(qi)(qi)體、氫(qing)化(hua)(hua)(hua)(hua)物(wu)氣(qi)(qi)(qi)(qi)體、反響性氣(qi)(qi)(qi)(qi)體、腐蝕(shi)性氣(qi)(qi)(qi)(qi)體等(deng)5個(ge)系列，50多(duo)種電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)特(te)氣(qi)(qi)(qi)(qi)進行結尾凈(jing)(jing)化(hua)(hua)(hua)(hua)，使電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)級(ji)(ji)氯化(hua)(hua)(hua)(hua)氫(qing)純(chun)度(du)由ppm級(ji)(ji)進步(bu)到(dao)ppb、ppt級(ji)(ji)，并將(jiang)特(te)氣(qi)(qi)(qi)(qi)傳輸和控制系統(tong)對(dui)氣(qi)(qi)(qi)(qi)體純(chun)度(du)的(de)(de)(de)(de)(de)影響降(jiang)至(zhi)最小，然后(hou)極(ji)大地改進工(gong)藝才能(neng)，下(xia)(xia)降(jiang)產物(wu)缺(que)點， 進步(bu)制程的(de)(de)(de)(de)(de)產值，滿意下(xia)(xia)一代半(ban)導體、微電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)以及關聯高(gao)(gao)(gao)技能(neng)開(kai)展(zhan)的(de)(de)(de)(de)(de)需(xu)求(qiu)。本項目將(jiang)構(gou)成有自(zi)主(zhu)知識產權的(de)(de)(de)(de)(de)超高(gao)(gao)(gao)純(chun)度(du)電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)級(ji)(ji)氯化(hua)(hua)(hua)(hua)氫(qing)凈(jing)(jing)化(hua)(hua)(hua)(hua)技能(neng)，處理超高(gao)(gao)(gao)純(chun)度(du)電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)級(ji)(ji)氯化(hua)(hua)(hua)(hua)氫(qing)凈(jing)(jing)化(hua)(hua)(hua)(hua)這一核心(xin)技能(neng)的(de)(de)(de)(de)(de)國產化(hua)(hua)(hua)(hua)問題。

    我公司所主營的鋼瓶裝電子級氯化氫產(chan)品分別經國(guo)家(jia)標準物質研(yan)究中心(xin)和信息產(chan)業(ye)部(bu)專用材料質量監(jian)督檢(jian)驗(yan)中心(xin)抽(chou)樣檢(jian)驗(yan)，純度大于99.999%，總(zong)雜(za)質含(han)量小于5ppm，符(fu)合國(guo)家(jia)標準GB/T24469-2009。